項目 | 指標純度% | ||||
高純氬氣(Ar) | 99.999 | 99.9995 | 99.9997 | 高純氬 99.999 | |
雜質含量(ppm) | 氮(N2) | ≤5 | ≤5 | ≤3 | ≤0.4 |
氧(O2) | ≤2 | ≤0.5 | ≤0.5 | ≤0.2 | |
氫(H2) | ≤1 | - | - | - | |
一氧化碳(CO) | - | ≤1 | ≤0.5 | ≤0.1 | |
二氧化碳(CO2) | - | ≤1 | ≤0.5 | ≤0.1 | |
水份 (H2O) | ≤4 | ≤0.5 | ≤0.5 | ≤0.2 | |
總烴類THC | ≤2 | ≤0.3 | ≤0.2 | ≤0.1 |
清溪高純氬氣廠家配送